PRODUCTS
All Products
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Semi-Automated Recovery System of Nano Contaminants (SC Series)
Semi-Automated Recovery System of Nano Contaminants
(SC Series)High-performance equipment to collect nano contamination on surfaces of silicon wafers.Details
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Automated Recovery System of Nano Contaminants (NAC Series)
Automated Recovery System of Nano Contaminants
(NAC Series)High-efficiency equipment to perform VPD process, collecting nano contaminants, and dilution of sampling on surface of silicon wafers by full automation.Details -
Bulk Etching Device (BEM-300)
Bulk Etching Device (BEM-310)
High-quality device to perform etching whole surface of silicon wafers with O3 and HF.Details -
VPDBOX (Vapor Phase Decomposition Box)
VPDBOX (Vapor Phase Decomposition Box)
A compact device that uses the natural vaporization of HF to VPD the oxide film and nitride film on the silicon wafer to make the wafer surface hydrophobic.Details -
Clean Draft (NCD Series)
Clean Draft (NCD Series)
An exhaust device with high cleanliness (class 10). The front door has a double structure, which generates negative pressure in the work space when the door is closed.Details -
Tweezers
Tweezers
Specially shaped PTFE tweezers designed to grab liquid holders and vials used in SC and NAC series.Details
CONTACT US
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Tel. +81-42-557-5207
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