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PRODUCTS

Semi-Automated Recovery System of Nano Contaminants (SC Series)

Semi-Automated Recovery System of Nano Contaminants
(SC Series)

SC-3100 SC-8100 SC-9100
About SC Series
Obtained International Patent for bevel recovery.
The world's top-class function and technology in collectinghydrophilic surface.

● High-performance equipment to collect nano contamination on surfaces of silicon wafers.

● It can perform sampling nano metal contamination from the surface and sides (bevel parts) of silicon wafers.

● Able to collect contamination of both hydrophobic and hydrophilic wafer surfaces.
* Please note that bevel parts are when hydrophobic wafers only.
* Applied to hydrophilic surface: SC-8100 and SC-9100 only

● Can sample wafers made of materials other than silicon and wafers whose surface has been roughened by bulk
etching. (such as SiC, GaN, sapphire compounds, the surface on blanket film wafer)
● Possible to recover ions other than heavy metals.

● Supply of recovery liquid and suction of recovery liquid after sampling are performed automatically (SC-3000 and SC-9000 only).

● There is no specific skills needed of the operator as the sampling process is performed by the device, and everyone can operate it easily.


Sampling Operation Video of SC-9100 (Only in Japanese)

Device Name SC-3100 SC-8100 SC-9100 SC-9200
Operation PC (*3)
Attaching / Detaching
Liquid Holders
Auto Manual Auto Auto
Supply of Sampling Liquid Auto Manual Auto Auto
Collection of
Sampling Liquid
Auto (*1) Manual Auto Auto
Basic Sampling Pattern Ring-shaped, Fan-shaped, Fixed, Radius, Arc
Additional Sampling
Pattern (*1)
Side (Bevel), Rectangle, Circular Segment
Orientation Flat (*2) Added to sampling pattern of Ring-shaped, Fixed Radius, Side (Bevel)
Auto Cleaning of
Liquid Holders
Sucking-Up Type
Collection of Liquid
Collection of Liquid
Sampling of
Hydrophilic Surface
Hydrophilic Surface
Size (W×D×H) 600×494×600 600×494×700 600×494×790 690×550×790
Weight 35Kg 40Kg 50Kg 55Kg
Recommended
Environment
Inside Clean Draft
Utilities AC-100-240V, DIW,
CDA
AC-100-240V, N2, CDA AC-100-240V, DIW, N2, CDA AC-100-240V, DIW, N2, CDA

*1-3: Those options and PC will be quoted separately


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Tel. +81-42-557-5207

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